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T-GARC Node: Datasets for Technology Database for Carbon Neutrality
Data stock: Default root data stock
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Compliance systems
Etching of wafer, etching gases mix, semiconductor industry average; etching; production mix
LCI result
KR
Materials production / Other materials
2023
2027
Hydrogen; from Small-scale hydrogen reforming; at plant; Single site; H2 (99.999%,30bar)
LCI result
KR
Materials production / Other materials
2024
2028
entries: 2 (19 total) (page 1 of 1)
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