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T-GARC Node: Datasets for Technology Database for Carbon Neutrality
Data stock: Default root data stock
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With output flow: PM10
entries: 1 (7 total) (page 1 of 1)
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Compliance systems
Etching of wafer, etching gases mix, semiconductor industry average; etching; production mix
LCI result
KR
Materials production / Other materials
2023
2027
entries: 1 (7 total) (page 1 of 1)
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