T-GARC Node: Datasets for Technology Database for Carbon Neutrality
Data stock: Default root data stock [ Download ]

Process data sets

With output flow: 12인치 웨이퍼(반제품)

NameTypeLocationClassificationReference yearValid untilCompliance systems
Etching of wafer, etching gases mix, semiconductor industry average; etching; production mixLCI resultKRMaterials production / Other materials20232027